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"The folks at Tystar are very helpful when we need support and have questions about how to approach and solve equipment problems; they are always willing to take time and help us out when we call"
-Mark mayhugh, Zilog Corporation
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FCS 30 / 10 PROCESS CONTROLLER The Tystar FCS 30/10 is a programmable central process controller for semiconductor process equipment systems. It handles recipe generation and storage, while monitoring and displaying equipment status, configuration and alarms for each furnace tube. The FCS 30/10 acts as a master controller, interfacing with the host computer (via an RS 232 serial communication data link), gas panel, temperature controller, vacuum system and wafer loader. The system's program and recipe generation include either remote terminal or tube level. The FCS 30/10 stores up to 10 recipes with process 400 steps each, features an abort program for fail-safe operation in the case of equipment malfunction, has three levels of password protection and provides a battery back-up with up to 45 days of retention. |
