MFS 460 ELECTRONIC GAS CONTROLLER

The Tystar MFS 460 Electronic Gas Controller directs the process gas flows up to six individual mass flow controllers. It operates in either manual or automatic mode, the MFS 460 monitors gas flows, provides flow error band, and displays set points and actual gas flows. For low-pressure CVD applications, the unit provides reactor pressure readout and closed-loop pressure control. The MFS 460 also stores gas interlocks, gas ratio controls and error bands in an EPROM, guaranteeing safe handling of all process gases. It interfaces (via an RS 232 serial communication data link) with the master controller, such as the Tystar FCS 10.