DCS 30 DATA COLLECTION SOFTWARE

The Tystar DCS 30 is a process data collection and monitoring system. Every ten seconds, it gathers and stores all process data from Tystar's FCS 10 controller, including temperature, gas flows, process pressure, location of the wafer load, alarms and set point deviations. Data can be displayed graphically or numerically. With the split-screen feature, process data can be compared with prior process batches. The stored process data can be later used for statistical process analysis.