FCS 10 PROCESS CONTROLLER

The Tystar FCS 10 is a programmable central process controller for semiconductor process equipment systems. It handles recipe generation and storage, while monitoring and displaying equipment status, configuration and alarms for each furnace tube. The FCS 10 acts as a master controller, interfacing with the host computer (via an RS 232 serial communication data link), gas panel, temperature controller, vacuum system and wafer loader. The system's program and recipe generation include either remote terminal or tube level. The FCS 10 stores up to 10 recipes with process 400 steps each, features an abort program for fail-safe operation in the case of equipment malfunction, has three levels of password protection and provides a battery back-up with up to 45 days of retention.