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Tystar offers a wide variety of control systems for use in the semiconductor industry. Our control systems have been refined with user input to a high level of perfection. All operator controls are installed in an easily accessible control console. Temperature sensing inside the tube, adaptive temperature control algorithm and integration of gas controls, pressure control, timing and sequencing, wafer loading and unloading have led to a powerful control system for semiconductor hot wall reactors.

For more information, please click on the control systems below:

FCS 10 Process Controller TCU Temperature Control Unit
FCS 20 Process Control Host MFS 460 Electronic Gas Controller
DCS 30 Data Collection Software TYMGARD Stand-Alone Controller