Tytan low stress silicon nitride LPCVD furnace system
• Home
• Tystar Technology
   Advantage

• Unique TYTAN
  Furnace Applications

• Contact Us

TYTAN furnace configuration

The TYTAN furnace offers great value to the small, medium and large silicon wafer manufacturer. The systems are available in various sizes and configuration as described in the table below. The systems are delivered in sections and fit easily through most doorways.

Atmospheric and LPCVD furnace system configuration chart
Click the above image for a larger table.