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Outstanding performance, reduced manufacturing costs
and improved
overall yields
TYTAN furnace systems offer a unique approach to the silicon wafer processing
industry. Our patented heat-plug provides you with a much more compact furnace—without
compromising throughput. This design results in superior process uniformity
and higher-yield wafer production. Used in volume production environments
as well as industry and university research laboratories, the TYTAN furnace
comes in a variety of configurations and can handle wafers of up to 12"/300mm
in diameter.
TYTAN provides these important benefits:
• A small footprint saves up to 40% of cleanroom space
• Superior process uniformity
• Outstanding throughput due to 95%+ up-time
• Processing of wafers up to 12"/300mm (see Tytan
Furnace Configuration for more detailed information.)
• Energy savings of up to 50% over competing designs
TYTAN furnaces are available in several sizes and configuration.
Click here for
the Tytan Furnace Configuration Page.
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