CUSTOM EQUIPMENT AND RETROFITS

Research and development, pilot line and high volume manufacturing of semiconductor, solid-state devices and MEMS are intricately tied to the available process equipment. While production equipment for high volume silicon chip manufacturing is readily available, high performance, quality prototype equipment for custom designed and R&D equipment is not. Tystar has extensive expertise in integrating reactors, gas control systems, heat, laser, UV light, RF and microwave sources. Tystar has proven designs for all required subsystems for integration into your custom designed equipment.

Semiconductor diffusion/oxidation furnaces and CVD equipment that has been in use for several years may lack current equipment performance efficiency. Tystar's experienced team can retrofit and/or upgrade your current process equipment to satisfy the more advanced requirements for process control, stability and automation, increased wafer size etc. Tystar offers a variety of subsystems that can enhance the performance and efficiency of your equipment. Tystar can upgrade and/or retrofit diffusion/oxidation and CVD equipment from most all major manufacturers. Please contact us to discuss your specific application.