GAS CONTROL EQUIPMENT

Tystar's gas control equipment manufactured provides precise control and blending of industrial gases used in the semiconductor manufacturing industry. The gas panels use compact, modular designs and are fabricated from 316 stainless steel with orbitally welded joints and connections. They are leak tested to 10^-8 cm³/sec with Helium. The MFS 460 Electronic Gas Controller provides safety interlocks and other critical gas control features. With the use of point-of-use filters the gases delivered are free of particles.