TYTAN Furnace Systems
TYTAN Standard Series
The Tytan Standard Systems are designed for diffusion, oxidation and LPCVD applications. The systems are compact and suitable for use in manufacturing and/or R&D environment. The Standard series have been well accepted as dependable process tools both in the industry and in the R&D community. They offer superior performance and process uniformities. The design incorporates several of the most advanced concepts required for high performance wafer processing tools. The advantages of the systems are:
- Small footprint for full 100 to 200 wafer loads
- Extremely high process uniformities
- Up-time performance in excess of 95%
- Large installed customer base
- Dedicated expert service
- Up to 8”/200 mm capability
- Electric power savings of up to 50%
Controls
The Tytan control systems have been refined over the years to a high level of perfection. Temperature sensing inside the process tube, adaptive temperature control algorithm and integration of gas controls, pressure control, timing and sequencing, wafer loading and unloading have led to TCU, FCS 10, FCS 20, DCS 30, and MFS 460. All controller components are SECS/GEM compatible
Wafer Ecology
Wafer contamination and particle deposition are key concerns of device manufacturers and R&D engineers. High purity, chemically resistant materials have been carefully selected for the gas distribution system and for all parts in contact with the wafers inside the reactor. Great care is exercised in pre-cleaning and assembling furnace parts. Point-of-use gas filters are used for all process gases entering the reactor tubes. Load station rating is better than Class 10.
Safety
Tytan safety features are designed-in, not after-thoughts. Toxic and hazardous gas leakages are kept to an absolute zero. Used for the gas panels are high-quality mechanical components, orbitally welded gas lines safety shut-off valves. Gas controls are designed in a fail-safe manner with a minimum of operator intervention. System will automatically default to a nitrogen purge mode in case of emergency. Safety interlocks are widely used in gas control systems to provide adequate gas purge cycles, time delays, and temperature interlocks.