Atmospheric Processes

TYTAN Furnace systems can be used for all conventional atmospheric pressure processes employed in the semiconductor industry. Processes run at temperatures above 1150°C require a thicker wall quartz tube, a SiC liner for the tube, SiC wafer boats, and SiC cantilever rods.

Click on any of the items to toggle content.


► Oxidation

► Diffusion of Solid Source Dopants

► POCl3 or BBr3 Liquid Source Dopant Diffusion

► Anneal

► NANO MATERIALS APCVD