Please fill out the following form and we will have a sales respresentative get in contact with you. Or if you would prefer, please send the following information in an e-mail to:
sales@tystar.com
FURNACE PROPERTIES
Type of System
*:
Please select a valid item.
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| Tytan Model
|
Mini Series
|
Standard Series
|
Extended Series
|
| 1600 |
1800 |
2800 |
3600 |
3800 |
4600 |
4800 |
6400 |
8300 |
8342 |
8442 |
| Wafer Size (in)
|
6 |
8 |
8 |
6 |
8 |
6 |
8 |
6 |
8 |
8 |
8 |
| Tubes up to
|
1 |
1 |
2 |
3 |
3 |
4 |
4 |
4 |
3 |
3 |
4 |
| Wafer per tube ATM
|
100 |
100 |
100 |
100 |
100 |
100 |
100 |
200 |
300 |
500 |
500 |
| Wafers Per Tube LPCVD
|
50 |
50 |
50 |
50 |
50 |
50 |
50 |
100 |
100 |
N/A |
N/A |
| Flat Zone
|
18 |
18 |
18 |
18 |
18 |
18 |
18 |
34 |
34 |
42 |
42 |
| Footprint
|
Length (in)
|
63 |
63 |
63 |
126 |
134 |
127 |
131 |
164 |
164 |
164 |
164 |
| Depth (in)
|
30 |
30 |
30 |
30 |
30 |
30 |
30 |
30 |
30 |
34 |
34 |
| Height (in)
|
54 |
54 |
62 |
69 |
82 |
82 |
82 |
82 |
82 |
82 |
82 |
| Maximum Power (KVA)
|
18 |
22 |
36 |
35 |
45 |
58 |
73 |
60 |
66 |
71 |
93 |
|
Voltage
*:
Please select a valid item.
(Highest voltage available is recommended)
Hertz
*:
Please select a valid item.
Vert/Horiz Laminar Flow Station
*:
Please select a valid item.
(Laminar flow creates class 10 clean room environment)
Gas regulators for each gas
*:
Please select a valid item.
(Recommended if other equipment using gas)
Type of Cantilever
:
Are MFCs Specified
:
If "Yes", please specify
:
Pump System
*:
Please select a valid item.
Is pump type specified
:
If "Yes", please specify
:
Any other special furnace requirements?
NEXT STEP
>>
SPECIFY CONTROLS
Controller
*:
Please select an item.
Host Computer
*:
Please select an item.
Control Mount
*:
Please select an item.
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CUSTOMIZE TUBES
Please select a valid item.
Tube
#1
Process (Gas Panel) Type
:
Please select a valid item.
Number of gas loops
:
Tube
#2
Process (Gas Panel) Type
:
Please select a valid item.
Number of gas loops
:
Please select a valid item.
Tube
#3
Process (Gas Panel) Type
:
Please select a valid item.
Number of gas loops
:
Please select a valid item.
Tube
#4
Process (Gas Panel) Type
:
Please select a valid item.
Number of gas loops
:
Please select a valid item.
Please specify the details for any additional loops
:
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>>