33 Reasons to Pick Tystar

1. Layout Flexibility: Tystar furnace layouts can be configured specifically to fit into a customerís clean room floor plan.

2. Autonomous Control of Tubes: Each individual tube has its own control computer which can run autonomously without affecting other tubes in case of computer failure.

3. Auto/Manual Switching: Gas, boat loader, and temperature controls can run in the manual mode should there be a failure of the tube computer.

4. Isothermal Chamber: Our patented isothermal chamber design results in outstanding process control which guarantees superior uniformities and low operation costs.

5. Multiple Recipe Loading: The tube computer can accommodate multiple recipes so no downloading is required when changing recipes.

6. Battery Backup: Each tube computer has a battery backup to retain the configurations and recipes for 30 days and no downloading is required when a power failure occurs

7. Multi-Step Abort Sequence: A multi-step abort sequence is utilized to protect the product and equipment in case a power failure occurs.

8. Auto/Manual Display & Control: In the event all computer controls fail, it is still possible to monitor and control the gas panel in the manual mode.

9. PID Closed Loop Pressure Control: Tystarís MFS-460 gas controllers do not require external set points for closed loop pressure control.

10. Local TCU Control/Diagnostics: In the event all computer controls fail, the temperature controller runs in the manual mode.

11. Flat Temperature Ramping: An algorithm is built into the TCU logic for synchronizing each temperature zone.

12. Recipe Guarantee: Tystar offers starter recipes for every process utilizing its extensive library of process recipes with guaranteed process verification.

13. Small footprint: Tystarís patented isothermal design creates the smallest footprint furnaces, which utilize lessclean room space.

14. High Efficiencies: Tystarís patented isothermal design creates low gas and electricity usage.

15. Maintenance Friendly: All Tystar furnaces are designed for easy access to all parts for ease of maintenance. We designed easily removable back panels for hard-to-reach parts. Electronic and electrical components are placed in sliding drawers, along with a slide-out interface plate. All other components are very easily accessed.

16. Adaptable Quartz Boat Design: The Tytan furnace systems can accept all wafer sizes from chips to 2-8Ē wafers and still maintain excellent uniformity by just changing the wafer boat. No equipment changes are necessary.

17. Rigorously Tested Parts: All parts used on Tytan furnace systems are name brand and certifiable. They have been rigorously tested over an extended period of time.

18. Proven Supplier Record: Tystar has a large worldwide installation base with over 1200 tubes installed. We can supply excellent customer references.

19. Strong Customer Network: Tystarís customer network is comprised of prestigious universities, laboratories and corporations, including: National Institute of Standards and Technology, Harvard University, Jet Propulsion Lab, Communication Research of Canada, National Research Council of Canada (NINT), University of Alberta, UC Berkeley, Georgia Tech., Stanford University, University of Texas, Dallas and Arlington, UCLA, USC, UCSB, Princeton University and many more.

20. Rapid Response (24 Hour): Tystar will respond to any service or support request within 24 business hours.

21. Lifetime Support: Complete process and technical support for the entire lifetime of the equipment.

22. Dedicated Team: Tystarís primary engineers have worked together for over 25 years.

23. Top-Rated Performance: Tystar has affordable pricing for top-rated equipment performance and technical support.

24. Support on Peripherals: Other vendor clean room fab peripherals can be purchased through Tystar.

25. SCE II Protocol: Each control component has Semiconductor SECS II protocol embedded in the software.

26. Multiple Safety Features: Examples include: door must be closed to continue processing, gas flows must be accurate and mixed properly, proper pressure must be present before processing and many more. Customer designed safety features can be included.

27. Dual T/C: Temperature is controlled by a profile T/C, using spike T/Cs as backup and power measurements as tertiary backup so no wafer load is lost due to T/C failure.

28. Power On Diagnostics: Each process tube has extensive Power On diagnostics.

29. Remote Access Diagnostics: Available for quick analysis and rectification from Tystarís facility.

30. Clean Exhaust: A unique proprietary exhaust system for Silicon Nitride has been developed, with the help of UCBerkeley, to lower maintenance and prevent hazing on wafers.

31. Built In Door Torque Down Logic: Tystarís boat loader has a built in torque down routine which assures a good, tight door seal.

32. Low Particle Generation: Tystar furnaces are designed for low particle generation

33. Dedicated Engineering Support Team: Tystarís engineering team has a proven record of excellence in furnace design.